"High-performance silicon capacitive pressure sensor" project to fill the gap

Shenyang High-tech Industrial Development Project, a high-tech industrial development project undertaken by Shenyang Instrument Institute, a subsidiary of the China National Aircraft Corporation, has successfully passed acceptance tests.

The project adopts advanced microelectronics and micromachining combined process technology, and is innovative in the design of silicon capacitive sensors, manufacturing process technology, sensor packaging structure, etc., solves the technical difficulties in the development of silicon capacitive sensors, developed and developed Completely owns a new type of high-performance silicon capacitive differential pressure sensor product with independent intellectual property rights, the product accuracy is better than 0.075% FS, and the technical level has reached the leading domestic and international first-class.

The project has built a silicon capacitive differential pressure sensor production line with an annual production capacity of 10,000 sets, which realizes the serial production of the products, and for the first time realizes the domestic matching of the core sensors of the smart transmitter products, breaking the foreign technology blockade and filling up the domestic blank. At the same time, as an upstream core device, this research has driven the development of sensors, transmitters, and related instrumentation industries, solved the problem of having no cores, and effectively supported the construction of the high-end equipment manufacturing industry chain.